SKU: 1000000106

LUXTRON M920 SERIES

OEM Semiconductor Module  The m924 (4channel) and m922 (2channel) Semiconductor modules are the newest LUXTRON products for... Περισσότερα


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OEM Semiconductor Module 

The m924 (4channel) and m922 (2channel) Semiconductor modules are the newest LUXTRON products for Etcher and Wafer Fab equipment temperature monitoring of Electrostatic Chucks, Chambers and other devices. The m920 Series modules are high performance solutions that are flexible, reliable and cost effective

Details

  • 2 and 4 channels
  • “Mix and Match” Probes with boards and channels
  • Reliable design based on thousands of Luxtron systems installed worldwide
  • Custom Probes for OEM's Applications
  • Probes are suitable for all EMI environments: Plasma, RF, Microwave, Magnetic, High Voltage
  • Metal Enclosure available

The m922 OEM system works with all current Semiconductor Luxtron® brand Fluoroptic probes and fiber optic extensions. 

Typical Applications

  • Plasma Etch Electrostatic Chuck monitoring
  • Plasma Shower monitor inside chamber
  • Temperature monitoring outside the chamber
  • Other Wafer Fab Equipment temperature monitoring
  • Semiconductor and FPD processing using RF and Plasma

Technical Specifications

  • Channels m922: 2   / m924: 4
  • Measurement Rate Up to 50 Hz per channel
  • Measurement Range -100 ... 330 °C (probe dependent)
  • Accuracy (Probe Dependent) ±0.05 °C
  • Measurement Resolution 0.01°C
  • Operating Temperature -40 °C ... 85 °C
  • Analog Output 0-10 V or 4-20 mA
  • Serial Communication RS-232 and RS-485
  • Protocol ASCII and Modbus (RS-485)
  • Input Power +5 to 24VDC nominal @ 100 mA
  • Dimension (Main Board) 23.7 mm (H) x 100.6 mm (W) x 134.4 mm (L)
  • Optional Accessory Metal Enclosure for Electromagnetic Shielding

More info

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